5322 281 20173 SMT Philips Spare Parts VACUUM VALVE 

JOY TECHNOLOGY CO.,LIMITED can supply other spare parts as follows：

5322 358 10173 Belt R-Axis Motor drive 

5322 358 10174 Belt, R-Axis Spline
9965 000 09055 Belt, head
5322 358 10276 Belt
9965 000 10373 Pulley
5322 528 81507 Pulley Conveyor
5322 358 31283 Belt
5322 360 10323 Piston Assy (Piston cylinder only for HEAD 1)
5322 360 10206 Piston, Head Up Down Assembly Heads 1-8
5322 360 10481 Piston, Assembly Spline up down
5322 462 10762 Plug 2, assy (lower plug contains items 4,5,11) 
5322 462 11201 Plug assy (plug assy 1-3-5-7)
9965 000 03801 Plug assy (plug assy 2-4-6-8)
5322 532 12547 Seal is located on the lower part of the piston shaft 
5322 532 12545 Chevron seal used in Piston upper and lower plugs.Packing, 
5322 532 12546 Chevron seal used in Piston assembly Packing 
5322 532 13169  Packing
5322 530 51347 Packing, 
5322 530 10289 O-ring, plugs
5322 530 51297 O-ring, metal caps
5322 530 10474 O-ring, plastic caps
5322 530 10292 O-ring, inlets
5322 530 10442 O-ring
5322 530 10441 O-ring
5322 502 60165 Screw (M2x3) leaf spring
5322 492 71713 Leaf spring
5322 492 11793 Leaf spring

5322 360 20081 Filter
5322 360 20106 MUFFLER
5322 530 70461 Circlip, shaft
5322 530 70526 CIRCLIP
5322 360 10207 Valve speed select
9965 000 03808 Valve, speed select 
5322 360 10208 Valve up/down
9965 000 03807 Valve, up-down select 
5322 693 11367 Single ejector
9965 000 09042 Ejector, Single 
5322 360 10209 Valve blow-off
5322 281 20202 Single valve
5322 216 04084 Vacuum sensor board
5322 216 04673 Vacuum sensor board
5322 132 00141 Sensor, head down sensing
9965 000 10927 Sensor, head down sensing
5322 132 00036 Sensor Head
5322 132 00132 Sensor W origin
5322 132 00056 Sensor 1-3 (L=1150)
9965 000 06136 Sensor 1-3 (L=1400) 
5322 130 10079 Sensor Presure

5322 693 11352 Spline assy (Complete spline shaft assy head 1)
5322 693 11199 Spline assy (Complete spline shaft heads 2-8, indicated with “Y” means 40 um accuracy)
5322 693 11539 Topaz Inner spline shaft heads 2-8
5322 693 11542 Inner Spline, 16 micron 
5322 535 10674 Shaft head asyy (shaft head assy head 1-3-5-7 for SF and FNC head)
9965 000 03802 SHAFT NOZZLE HEAD 
5322 535 10676 Shaft head assy (spline shaft assy 2-4-6-8 only for FNC head)
9965 000 10930 Spline Shaft, Even Heads, FNC
9965 000 10928 Spline Shaft, even Heads SF 
9965 000 10929 Spline Shaft, Odd Heads SF and FNC 
9965 000 10928 Spline Shaft, even Heads SF 
9965 000 10929 Spline Shaft, Odd Heads SF and FNC
5322 216 04674 I/O Board for Topaz Xii (BD CNV)
9965 000 11067 I/O Core Board for Topaz Xii (BD)
5322 360 10483 Nozzle assy (nozzle assy heads 2-4-6-8)
5322 360 40523 Cylinder Main Stopper
5322 535 92541 Speed Controller
5322 360 40471 Cylinder sub stopper
5322 360 10205 Cylinder up/down
5322 526 40896 Joint

If there is no matching models，pls contact us directly!

（Email: evan@joysmt.com)